发明名称 BONDING METHOD AND SEMICONDUCTOR MANUFACTURING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a bonding method by which quality can be improved and a bonding duct can be shortened, and to provide a semiconductor manufacturing device. SOLUTION: The thickness of a semiconductor chip 1 is measured and measurement data are stored. The pickup level of an absorption maintenance means 2A before it is made to abut on one surface in the thickness direction of the semiconductor chip 1 is set based on measurement data. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005183486(A) 申请公布日期 2005.07.07
申请号 JP20030418519 申请日期 2003.12.16
申请人 SHARP CORP 发明人 MATSUO TAKANOBU
分类号 H01L21/52;(IPC1-7):H01L21/52 主分类号 H01L21/52
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