| 摘要 |
PROBLEM TO BE SOLVED: To prevent the entry and attachment of suspended matter on a reflection face due to an inflow gas even when a movable part is driven at high speed and with a large deflection angle in an atmosphere in which such suspended matter as mote and dust exist, thus to prevent the reduction in reflectance and the deterioration in picture image quality. SOLUTION: In a light deflector which has a supporting substrate, a movable part supported around a torsion axis with a free torsional oscillation by an elastic supporting part on the supporting substrate and a reflection face formed on the movable part, incident light which is made incident on the reflection face is deflected by driving relatively to the supporting substrate by driving the movable part, and the light deflector is characterized by that an inflow of air to the reflection face is cut off by providing a blowing path which blows wind to transverse the reflection face and an optical path and providing a blow port of the blowing path in the vicinity of the reflection face. COPYRIGHT: (C)2005,JPO&NCIPI
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