| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray inspection device which can shorten the inspection time. SOLUTION: The X-ray inspection device is constituted so that X-rays emitted from an X-ray generator 1 are made simple in wavelength and parallel by left and right monochrometers 3, not only to irradiate an object A to be inspected, but also to detect the respective transmitted X-rays transmitted through the object to be inspected. An X-ray dividing slit 2, for dividing the emitted X-rays into two, is arranged in the vicinity of the emitting orifice of the X-ray generator 1 and two monochromators 3A and 3B for irradiating the object A to be inspected with X-rays are arranged, corresponding to the number of divisions of X-rays due to the X-ray dividing slit 2. COPYRIGHT: (C)2005,JPO&NCIPI
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