| 摘要 |
PROBLEM TO BE SOLVED: To provide an interferometer capable of reducing a frequency residue waviness causing the lowering of measurement accuracy. SOLUTION: This interferometer comprises a light flux dividing means 41 for dividing a light flux from a light source 1 into reference light and measuring light; a measuring means 7 for measuring the characteristic of an optical system 5 to be measured by measuring the interference state between the reference light and the measuring light via the optical system 5 to be measured; and an aperture diaphragm 8 arranged between the optical system 5 to be measured and the measuring means 7. The interferometer is constituted so that the light transmittance of an aperture part of the aperture diaphragm 8 is gradually reduced from the center part toward the peripheral part of the aperture part of the aperture diaphragm 8. COPYRIGHT: (C)2005,JPO&NCIPI
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