METHOD FOR STRAIGHTENING WARPING OF CERAMIC PLATE, AND METHOD FOR MANUFACTURING SPACER FOR FLAT PANEL DISPLAY

摘要

PROBLEM TO BE SOLVED: To provide a method for straightening warping of a ceramic plate capable of easily straightening the warping of the ceramic plate, and a method for manufacturing a spacer for a flat panel display using the straightening method. SOLUTION: The method for straightening the warping of the ceramic plate 50 in which the warping is generated has an etching process of etching a surface 50A formed to a convex shape by the warping in the ceramic plate 50 by irradiating the surface 50A formed to the convex shape with a beam of at least either of an ion beam or neutral particle beam. COPYRIGHT: (C)2005,JPO&NCIPI