| 摘要 |
An angular rate sensor includes a quadratic prism-like oscillator 1 a formed by laminating a substrate 2 and a piezoelectric material 3 , the piezoelectric material 3 is made of piezoelectric ceramics including PZT (Lead Zirconate Titanate) as a main component, and the substrate 2 is made of a material other than PZT having physical property values equivalent to or less than PZT, which is a main component of the piezoelectric ceramics, with respect to Young's modulus, thermal expansion coefficient, and the like.
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