METHOD FOR JOINING AT LEAST A FIRST MEMBER AND A SECOND MEMBER, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD, AS WELL AS A DEVICE MANUFACTURED THEREBY

摘要

A method for joining at least two members of a lithographic apparatus is disclosed. The method includes providing a first member, providing a second member, direct-bonding the first member and the second member to form a direct-bond, and anodically bonding the first member and the second member. At least one of the members includes ultra low expansion glass and/or ultra low expansion glass ceramics.