| 摘要 |
The invention relates to a sensor for measuring a gas concentration or ion concentration having a substrate ( 11 ); a drain ( 3 ) fashioned on the substrate; a source ( 2 ) fashioned on the substrate; a channel region ( 4 ) of the substrate, which is arranged between drain ( 3 ) and source ( 2 ); a conductive guard ring ( 1 ), which is arranged outside the channel region; a sensitive gate layer ( 8 ) whose potential depends on an ambient gas concentration or ion concentration, there being an air gap ( 10 ) between the gate layer and the channel region ( 4 ). In order to create a sensor that can be manufactured at low cost, has small dimensions, and nevertheless guarantees a high accuracy of measurement for the change in concentration as a function of time, it is provided that a ring structure ( 20 ) made of a different surface material having a surface conductivity lower than that of the rest of the surface region is fashioned between the guard ring ( 1 ) and the channel region ( 4 ). |
