| 摘要 |
PROBLEM TO BE SOLVED: To provide a composite stamper for imprint lithography. SOLUTION: The stamper has a patterned layer made of a hard material and a back plane layer made of a compressible material. The back plane layer may be composed of an elastomer. The stamper may be used to imprint an embossable layer disposed on a substrate for the production of a magnetic recording disk. COPYRIGHT: (C)2005,JPO&NCIPI
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