ENERGY DEVICE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To enhance both of capacity and cycle characteristics of an energy device using a thin film containing silicon as the main component as a negative active material.

SOLUTION: A negative active material thin film installed directly or through a primary coat on a current collector layer has a multilayer structure containing two or more silicon thin films containing silicon as the main component. Increase in thickness of the silicon thin film per layer can be prevented by increasing the number of silicon thin film layers even if the thickness of the negative active material thin film is increased. Growth of almost reverse truncated cone-like silicon particles in the silicon thin film can be prevented. Even if the negative active material layer is made thick and capacity is increased, drop in cycle characteristics can be prevented.

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