| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus capable of making machining shapes by two machining beams identical. <P>SOLUTION: The laser beam machining apparatus is constituted such that two linear polarizing machining beams 8, 9 which, split by a beam splitter 7, have an oscillating direction orthogonally crossing mutually are superimposed by a polarizing beam splitter 11, and that the polarized state of the machining beams 8, 9 is converted to circularly polarized light by a 1/4 wavelength plate 14 and made incident on a substrate 17. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
