| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a polishing method capable of finishing and processing a surface of a work piece in high precision and in high efficiency by dissolving a problem of reduction in delivery speed of abrasive grains due to reduction of flow velocity in the neighborhood of the surface of the work piece which conventional technology has. <P>SOLUTION: The delivery speed of the abrasive grains necessary for EEM process is obtained by mixing mother grains a grain diameter of which is larger than that of the abrasive grains in polishing liquid and pushing the abrasive grains carried at the lower flow velocity in the neighborhood of the surface of the work piece by the mother grains carried at the higher flow velocity in the neighborhood of a polishing tool. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
