| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an inspection method which enables the precise detection of a transparent foreign matters on color filters for properly selecting conforming and defective color filters, and to provide an inspection device therefor. <P>SOLUTION: The inspection light, emitted from alight source, is applied to the inspection region of the color filter through a half mirror, a pinhole optically conjugated with an inspection surface and an object lens and the inspection light, which is reflected by the surface of the color filter and passed through the object lens, the pinhole optically conjugated with the inspection surface and the half mirror, to reach an optical detection element, is converted to an electrical signal to decide that specifically changed point is a flaw. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
