| 摘要 |
PROBLEM TO BE SOLVED: To provide a load sensor with a structure utilizing a magnetostrictive effect, used for measuring high sensitivity and high accuracy in a region with relatively small loads, and to provide its manufacturing method. SOLUTION: An element of this load sensor is obtained, by forming a layer of a material having a magnetostrictive effect on a surface of a base material made by shaping a nonmagnetic elastic body into a form of a compression coil spring, a tensile coil spring, a torsion coil spring, a leaf spring, a spring washer, a wave washer, a conical spring washer, or the like. When applying load on the element, changes in magnetization due to a deformation thereof is detected, as a change in the inductance by a coil attached to the element. Since the base material has a form causing even a small load to bring about large deformations, a relatively small load can be detected with high sensitivity and high accuracy. COPYRIGHT: (C)2005,JPO&NCIPI
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