| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a radiation sensitive resin composition having high planarization performance, high sensitivity and high solvent resistance and ensuring high productivity. <P>SOLUTION: In the radiation sensitive resin composition comprising an alkali-soluble resin (A) having curability, a quinonediazido compound (B) and a solvent (C), ≥40% by mass of the solvent (C) is ethyl lactate. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
