| 摘要 |
PROBLEM TO BE SOLVED: To provide an Si-based organic/inorganic hybrid membrane having various excellent characteristics by a vapor phase growth method in a simple manner at low cost. SOLUTION: In the method of forming the Si-based organic/inorganic hybrid membrane, a heating filament 2 and a substrate 3 arranged to face the filament are disposed in a reaction vessel 1 and the vapor of at least one compound selected from alkyl silane, alkoxy silane and amino silane is introduced together with the vapor of an organic compound including an ethylene bond into the reaction vessel 1 toward the heating filament 2 and thereby, the Si-based organic/inorganic hybrid membrane containing at least carbon and silicon is formed on the substrate 3. COPYRIGHT: (C)2005,JPO&NCIPI |
