ELECTLET CAPACITOR AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide electlet capacitor which ensures excellent moisture-resistant characteristic. SOLUTION: An electlet silicon oxide film 7 formed on a silicon substrate 6 is sandwiched by an insulating film 9 and a metal film 8, thereby preventing the silicon oxide film 7 from being exposed. In this case, immediately before formation of the metal film 8 with a sputter, the silicon oxide film is converted to an electlet within the vacuum chamber of the sputtering apparatus using the silicon oxide film. A highly reliable electlet capacitor can be provided by controlling moisture absorption of the electlet. COPYRIGHT: (C)2005,JPO&NCIPI