METHOD FOR MANUFACTURING MICROLENS

摘要

PROBLEM TO BE SOLVED: To manufacture an aspherical microlens through a multilayer wafer substrate. SOLUTION: A microlens manufacturing method comprising a step for forming a 1st layer having a prescribed etching rate, a step for forming a 2nd layer of which the etching rate is different from that of the 1st layer on the 1st layer, a step for forming a mask pattern for etching on the 2nd layer, and a step for forming an aspherical lens shape by etching the 1st and 2nd layers having respectively different etching rates is provided. COPYRIGHT: (C)2005,JPO&NCIPI