| 摘要 |
PROBLEM TO BE SOLVED: To improve the reliability of a silicon substrate for a liquid crystal display panel which has a multi-layered metal structure by suppressing defects of the silicon substrate which occur afterward owing to damage given during a glass substrate cutting stage. SOLUTION: A pad part 2 which should be connected to an electrode on the side of a wire to a silicon substrate 1 is divided into a 1st pad part 2a and a 2nd pad part 2b. Then the 2nd pad part 2b is constituted in two-layered structure to short-circuit the pad parts 2a and 2b to each other when a glass piece 54a damages the silicon substrate 1. Namely, fragmentary damage causing defects to occur afterward can be recognized from the short-circuiting between those pad parts 2a and 2b. Then, when the short-circuiting between the pad parts 2a and 2b is confirmed to consider that the fragmentary damage is given, the silicon substrate 1 is judged as a defective to suppress defects to occur afterward, thereby improving the reliability of the product. COPYRIGHT: (C)2005,JPO&NCIPI
|
