| 摘要 |
PROBLEM TO BE SOLVED: To improve measuring accuracy by bettering thermal stability by lowering a temperature increase in a measuring probe used for an optical measuring device or the like. SOLUTION: The measuring probe obtains positional information of a face 6a to be measured. The measuring probe includes a movable member 21 providing a contact 25 brought into contact with the face to be measured 6a on an edge and forming a reflecting face 27 reflecting a measuring light on a base end, a magnetic body 23 attached to the movable member 21, a fixed member 20 installed in a fixed state, a bearing 22 provided on the fixed member 20 and movably supporting the movable member 21 in the direction of an axial line 28, and a magnetic force generating part 24 provided on the fixed member 20, acting on the magnetic body 23 and generating force moving the movable member 21 in the direction of the axial line 28. The movable member 21 is constituted of a non-magnetic material, and the bearing 22 and the fixed member 20 are constituted of a magnetic material. COPYRIGHT: (C)2005,JPO&NCIPI
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