| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface analyzer capable of preventing an orbit of a primary electron beam from being deflected by a leakage electric field from an input lens, free of mesh disturbing the advancing path of a secondary electron beam between the input lens and a sample, and capable of high precision analysis of micro areas of the sample. SOLUTION: This surface analyzer is provided with a primary beam irradiation means for irradiating the sample with the primary beam, an input lens for collecting secondary charged particles generated from the sample, a spectroscopic means for spectrally separating the secondary charged particles collected by the input lens, and a primary beam correction means for correcting the influence imparted to the primary beam by the input lens. COPYRIGHT: (C)2005,JPO&NCIPI
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