| 摘要 |
PROBLEM TO BE SOLVED: To provide a robot arm device capable of independently rotating arms and blades. SOLUTION: A housing 100 is rotated by a first driving unit. Lower part arms 201, 202 are rotatably supported on the housing 100, and rotated independently of the housing 100 by a second driving unit. Upper part arms 301, 302 are rotatably supported on the lower part arms 201, 202, and rotated independently of the housing 100 and the lower part arms 201, 202 by a third driving unit. The blades 401, 402 on which substrates are arranged are rotatably supported on the upper part arms 301, 302, and rotated independently of the housing 100, the upper part arms 301, 302, and lower part arms 201, 202 by a fourth driving unit. COPYRIGHT: (C)2005,JPO&NCIPI
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