| 摘要 |
An optical component and a coating system for coating substrates for optical components with essentially rotationally symmetric coatings, the system having a planetary-drive system ( 1 ) that has a rotating planet carrier ( 2 ) and several planets ( 4 ), each of which carries a single substrate, that corotate both with the planet carrier and with respect to the primary carrier. In one embodiment a set of stationary first masks ( 20 ) that allow controlling the radial variation in physical film thickness is arranged between a source ( 8 ) of material situated beneath the planets and the substrates. A set of second masks that mask off evaporation angles exceeding a limiting evaporation or incidence angle (beta max) for every substrate also corotate with the primary carrier ( 2 ), which allows depositing coatings having a prescribed radial film-thickness distribution and a virtually constant density of the coating material over their full radial extents for relatively low, and only slightly varying, evaporation angles.
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