| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor which can obtain high sensor sensitivity. SOLUTION: In the pressure sensor 1, an inter digital transducer 21 is formed on the upper surface of a piezoelectric substrate 10; reflectors 22 are disposed on both sides with respect to the propagation direction of a surface acoustic wave, for the inter digital transducer 21; and the pressure variation is detected by the deformation of the piezoelectric substrate 10 positioned immediately below the inter digital transducer 21. The thickness of the piezoelectric substrate 10 positioned immediately below the inter digital transducer 21 is made to be smaller than the thickness of the piezoelectric substrate 10 positioned immediately below the reflectors 22. COPYRIGHT: (C)2005,JPO&NCIPI
|
