发明名称 |
Spatial light modulator with hidden comb actuator |
摘要 |
Described are Micro-Electro-Mechanical Systems (MEMS) actuators with hidden combs and hinges. The ability to hide the combs renders the actuators useful in digital micro-mirror devices. Comb actuators provide increased torque, which facilitates the use of stiffer, less fragile hinge structures. Also important, comb actuators do not require mechanical stops to define stable states, and thus avoid problems associated with physical contact. The actuators are infinitely variable through a range of angles.
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申请公布号 |
US6914711(B2) |
申请公布日期 |
2005.07.05 |
申请号 |
US20030394835 |
申请日期 |
2003.03.22 |
申请人 |
ACTIVE OPTICAL NETWORKS, INC. |
发明人 |
NOVOTNY VLAD J.;SHAH PAREN |
分类号 |
G02B26/08;(IPC1-7):G02B26/00 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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