| 摘要 |
A flow controller and a flow controlling method are adapted to be released from conventional restrictions by using a novel type called a pulse shot type. A pulse shot (opening/closing operation of a first cutoff valve ( 12 ) and, after that, opening/closing operation of a second cutoff valve ( 17 )) is repeated. Simultaneously, a volume flow Q of process gas exhausted from the second cutoff valve ( 17 ) per unit time on the basis of after-filling pressure and after-exhaust pressure of the process gas in a gas filling capacity ( 13 ) measure by a pressure sensor ( 14 ). Furthermore, a mode of the pulse shot is changed to control the volume flow Q of the process gas exhausted from the second cutoff valve ( 17 ) per unit time. |
