发明名称 SEMICONDUCTOR STRUCTURE, AND METHODS FOR FABRICATING SAME
摘要 The invention relates to a method of producing a semiconductor structure, the method comprising: - forming in a first semiconductor material substrate (30) a first dielectric area (32a-c) of a first dielectric material having a first thickness and a second dielectric area (34a-b) having a second thickness, - assembling said first substrate with a second semiconductor material substrate (40), - fracturing the portion of the substrate in which the weakened layer is produced, and- thinning one or both substrates.
申请公布号 KR20050070116(A) 申请公布日期 2005.07.05
申请号 KR20057007871 申请日期 2005.05.03
申请人 S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES 发明人 GHYSELEN BRUNO;RAYSSAC OLIVIER;AULNETTE CECILE;MAZURE CARLOS
分类号 H01L21/762;(IPC1-7):H01L27/12 主分类号 H01L21/762
代理机构 代理人
主权项
地址