发明名称 Methods of forming circuit traces and contact pads for interposers utilized in semiconductor packages
摘要 The invention encompasses methods of preparing interposers for utilization in semiconductor packages. The invention includes a method in which an interposer substrate having a surface and a conductive layer extending over the surface is provided. Pads are formed on the conductive layer by plating a conductive material on the conductive layer while using the conductive layer as an electrical connection to a power source and without utilizing conductive busses, other than the conductive layer. Subsequent to the formation of the pads, the conductive layer is patterned into circuit traces. Methodology of the present invention can be utilized for, for example, forming board-on-chip constructions.
申请公布号 US6913952(B2) 申请公布日期 2005.07.05
申请号 US20030612837 申请日期 2003.07.03
申请人 MICRON TECHNOLOGY, INC. 发明人 MOXHAM STEPHEN F.;KHENG LEE TECK;THUMMEL STEVE
分类号 H01L21/48;H01L21/8242;H01L23/13;H01L23/498;H01L23/50;H05K1/03;H05K3/00;H05K3/06;H05K3/24;H05K3/40;H05K3/42;(IPC1-7):H01L21/48 主分类号 H01L21/48
代理机构 代理人
主权项
地址