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发明名称
MANIPULATOR ASSEMBLY IN ION IMPLANTER
摘要
申请公布号
KR20050068729(A)
申请公布日期
2005.07.05
申请号
KR20030100495
申请日期
2003.12.30
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
BONG, SUNG JONG;EOM, HONG KUK;YOU, DOO SANG
分类号
H01J3/26;H01J37/08;H01L21/265;(IPC1-7):H01L21/265
主分类号
H01J3/26
代理机构
代理人
主权项
地址
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