| 摘要 |
PROBLEM TO BE SOLVED: To provide an photolithography system collecting data from other optical lithography systems efficiently and capable of dealing with a trouble quickly. SOLUTION: When data is transferred from a photolithography system 10 to a server 61, traffic of a network 71 is detected at first at a traffic monitoring section. If the traffic is high, respective photolithography systems 10 transfer data sequentially to the server 61. If the traffic is very high, the data is processed furthermore thus reducing the volume of data being transferred. If the traffic is low, data is transferred collectively from a plurality of photolithography systems 10. In this case, data may be transferred while being processed as required. The transferred data is subjected to analysis or automatic diagnosis at the server 61. Since data is transferred appropriately from the photolithography systems 10 to the server 61, a trouble can be dealt with quickly upon occurrence and such problems as rejectable products are mass produced continuously, or the like, can be avoided. COPYRIGHT: (C)2005,JPO&NCIPI
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