| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid controller for actualizing a great amount of fluid to flow without increasing its size. SOLUTION: A recess 25 of a body 22 consists of a large diameter portion 25a near an opening and a small diameter portion 25c ranging downward to the large diameter portion 25a via a step portion 25b. A flow path forming disc 26 is fitted to the recess 25. The flow path forming disc 26 consists of a large diameter cylindrical portion 31 fitted to the recess large diameter portion 25a, a connection portion 32 received by the recess step portion 25b, and a small diameter cylindrical portion 33 having an outer diameter smaller than the inner diameter of the recess small diameter portion 25c and having a lower end received by the bottom face of the recess 25. The connection portion 32 of the flow path forming disc has a plurality of through-holes 34 for communicating an annular space S1 outside the small diameter cylindrical portion with an annular space S2 inside the large diameter cylindrical portion. A fluid inflow path 23 is communicated with the lower end of the small diameter cylindrical portion 33 of the flow path forming disc 26, and a fluid outflow path 24 is communicated with the annular space S1 outside the small diameter cylindrical portion. COPYRIGHT: (C)2005,JPO&NCIPI
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