| 摘要 |
To avoid change in plating performance, even where operation of the plating equipment is interrupted, the properties of the plating solution need to be preserved. For plating equipment having an insoluble anode, add a reservoir ( 7 ) for storing a replacement solution to the tank ( 4 ) having a metal ion supply source (copper ball ( 5 )) and, upon termination of the plating operation, the entire plating solution is discharged from the tank ( 4 ) containing the metal ion supply source, while the solution for replacement is transferred from the reservoir ( 7 ) to the empty tank having a metal ion supply source, and immediately prior to the resumption of the plating operation transfer the solution for replacement back to the reservoir ( 7 ) and return the plating solution to the tank ( 4 ) containing the metal ion supply source.
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