| 摘要 |
The invention relates to a carrier (10) for an object (12), preferably a substrate of a semiconductor component such as a wafer, comprising a receiving element for the object and gas outlets arranged below the receiving element along the object thus received. At least sections of the carrier (10) are made of a material which comprises stabilizing fibres (18,20) and whose porosity forms the gas outlets in order to enable a desired gas to exit from the gas outlets in a dosed and finely distributed manner. |
