OZONE PROCESSING METHOD AND OZONE PROCESSING SYSTEM

摘要

Water vapor is mixed into an O3 gas generated by a discharge ozone generator. The mixed fluid is cooled by a cooling means, whereby impurities such as metals and nitrogen oxides contained in the O3 gas are dissolved into condensed water. Following that, the O3 gas is separated from the condensed water using a gas-liquid separator. Then, water vapor is mixed into the O3 gas again. The resulting mixed fluid is passed through a metal trap composed of a container holding many silicon chips as a metal adsorbing material, whereby remaining metals are removed.