| 摘要 |
PROBLEM TO BE SOLVED: To provide a variable reflection direction mirror apparatus which is compact, easily mounted as an integrated unit with another optical circuit, operated at high speed with a short response time, and driven at a low voltage, to provide a manufacturing method therefor, and to provide a variable optical path apparatus (optical switch) using the mirror apparatus. SOLUTION: The variable reflection direction mirror apparatus 10 is composed of unit mirror parts 2 having a variable angle light reflection face 3, a hold part 6 which holds the non-variable angle part 5 of the mirror part, and electrodes 7 unevenly furnished at positions facing to the mirror part 2 so that the variable angle part 4 of the mirror part 2 is deformed and operated with a voltage applied on the mirror part 2 and an electrode 7. The variable optical path apparatus is formed with the variable reflection direction mirror apparatus 10, a light incident means which guides incident light to the variable angle light reflection face 3 of the variable reflection direction mirror apparatus 10 and a light receiving means which receives the reflected light from the light reflection face 3 of which direction varies depending on the voltage applied on the electrode 7. COPYRIGHT: (C)2005,JPO&NCIPI |
