| 摘要 |
PROBLEM TO BE SOLVED: To provide a bellows pump having highly accurate suction/delivery capability without being influenced by internal pressure of a bellows. SOLUTION: This bellows pump is equipped with a bellows 2 having an entrance for liquid passing through, a pressure proof cylinder 1 having a driving part 15 extending/shrinking the bellows 2 and forming a clearance 3 having high airtightness between the cylinder and at least the outer side of the accordion-shaped part 23 of the bellows 2, and a pressure regulating part 4 regulating pressure in the clearance 3 so as to balance with the internal pressure of the bellows 2. COPYRIGHT: (C)2005,JPO&NCIPI |
