| 摘要 |
PROBLEM TO BE SOLVED: To provide a sealed clean unit which can reduce a chemical component by circulating nitrogen through a high-performance filter. SOLUTION: A nitrogen circulated clean unit comprises a subchamber for loading or unloading a workpiece, and main chamber having a clean environment in which a processor for subjecting the workpiece to various types of processing. The subchamber includes load/unload regions having a nitrogen inlet port, an air filter, a pressure blower for circulating nitrogen, and an outlet port. The main chamber includes a work region having a high-performance air filter, a pressure blower for circulating nitrogen, a nitrogen inlet port, and an outlet port. COPYRIGHT: (C)2005,JPO&NCIPI
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