SCANNING ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To trap efficiently by a secondary electron detector by correcting and controlling the orbit of secondary electrons generated from a testpiece. SOLUTION: A first auxiliary electrode 13 on which a negative potential of several V (volt) to several dozens V is impressed is installed at the portion near the irradiation port of an objective lens 1, and a second auxiliary electrode 14 for impressing a positive voltage is installed on a secondary electron detector 5 side of the first auxiliary electrode, thereby corrects and controls the orbit of secondary electrons. Furthermore, a third auxiliary electrode 12 for trapping assisting the secondary electrons generated from the testpiece 2 is installed at the secondary electron detector 5 in front of the detector. COPYRIGHT: (C)2005,JPO&NCIPI