| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dustproof substrate for a liquid crystal panel by which high reliability and good image quality can be obtained. <P>SOLUTION: The dustproof substrate 5 for the liquid crystal panel is formed with an antireflection film 52 on a substrate 51 composed of calcium fluoride (CaF<SB>2</SB>). The surface roughness of the main surface of the substrate 51 on the side formed with the antireflection film 52 is specified to over 0 to ≤1.5 nm in center line average height (Ra). The antireflection film 52 is composed of laminated films of three layers 52a, 52b and 52c which are deposited by a sputtering method, respectively. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
