| 摘要 |
PROBLEM TO BE SOLVED: To prevent separation electrical discharge from being generated by electrification by separation in a protection tape separation method for separating a protection tape applied to the substrate surface in one piece by using a separation tape, and in a device using the method. SOLUTION: A separation roller 25 is moved along the upper surface of the protection tape on a substrate W in which the protection tape P is applied, the separation tape T supplied to the separation roller 25 is applied to the protection tape P, and the separation tape T is peeled off following the travel of the separation roller 25 for guidance, thus separating and removing the protection tape P from the substrate W in one piece with the separation tape T. In this case, conductivity is given to at least the surface of the separation roller 25, charge generated at the protection tape separation part is released via the separation roller 25 for separating and moving the separation roller 25. COPYRIGHT: (C)2005,JPO&NCIPI
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