| 摘要 |
PROBLEM TO BE SOLVED: To reduce wafer vibration causing image vibration, in an electron microscope for carrying out inclined observation of a semiconductor wafer. SOLUTION: A damping seat is mounted at the center part of this wafer holder. The damping seat is so structured as to support a contact part to the back face of a wafer by a thin plate of a resin material; and a longitudinal spring constant is set in a range 1-5 times as much as that at the center part of the wafer with a periphery fixed. Thereby, vibration of the wafer can efficiently be reduced while avoiding adhesion of foreign matter, and high-resolution observation is enabled. COPYRIGHT: (C)2005,JPO&NCIPI
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