| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample information measuring method and a scanning type confocal microscope which enhance an operability of a three dimensional information acquisition, while displaying a surface shape of an observed sample intuitively and intelligibly. SOLUTION: The method comprises irradiating a light of a light source via an objective lens to the sample; changing discretely a relative position of a condensing position of the objective lens and the sample along a light axis direction of a convergence light; acquiring the information of a light intensity from the sample in each relative position, respectively; extracting a plurality of the light intensity informations from these light intensity information groups; estimating the maximum value and its relative position on a changing curve which adapts the plurality of the extracted light intensity informations. When acquiring the maximum value and its relative position of the estimated light intensity information as the intensity information and a height information, respectively, the intensity information and the height information of the sample are obtained continuously by moving repeatedly and reciprocatively the relative position of the condensing position of the objective lens and the sample along the light axis of the convergence light discretely. COPYRIGHT: (C)2005,JPO&NCIPI
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