发明名称 MOS transistor and method of manufacturing the same
摘要 A metal oxide semiconductor (MOS) transistor and a method of manufacturing the same are disclosed. An example MOS transistor includes a semiconductor substrate of a first conductivity type where an active region is defined, a gate insulating layer pattern and a gate formed on the active region of the substrate, a spacer formed on side walls of the gate, and source/drain extension regions of a second conductivity type formed within the substrate at both sides of the gate. The example MOS transistor further includes source/drain regions of the second conductivity type formed within the substrate at both side of the spacer and punch-through suppression regions of the first conductivity type formed within the active of the substrate. The punch-through suppression regions surround the source/drain extension regions and the source/drain regions under the gate.
申请公布号 US2005139911(A1) 申请公布日期 2005.06.30
申请号 US20040023104 申请日期 2004.12.27
申请人 KIM HAK-DONG 发明人 KIM HAK-DONG
分类号 H01L21/265;H01L21/336;H01L29/10;H01L29/76;H01L29/78;H01L29/94;H01L31/062;H01L31/113;H01L31/119;(IPC1-7):H01L21/336 主分类号 H01L21/265
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