摘要 |
A metal oxide semiconductor (MOS) transistor and a method of manufacturing the same are disclosed. An example MOS transistor includes a semiconductor substrate of a first conductivity type where an active region is defined, a gate insulating layer pattern and a gate formed on the active region of the substrate, a spacer formed on side walls of the gate, and source/drain extension regions of a second conductivity type formed within the substrate at both sides of the gate. The example MOS transistor further includes source/drain regions of the second conductivity type formed within the substrate at both side of the spacer and punch-through suppression regions of the first conductivity type formed within the active of the substrate. The punch-through suppression regions surround the source/drain extension regions and the source/drain regions under the gate.
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