发明名称 PHOTOCHROMIC SUBSTRATE CONTAINER
摘要 A semiconductor wafer, substrate, or reticle storage or shipping container (10, 24) that includes a photochromic indicator of exposure to undesired electromagnetic radiation. A photochromic material is incorporated into the plastic used to fabricate at least a portion of the container. The photochromic material may change color or darkness in response to exposure to a selected range of wavelengths of light.
申请公布号 WO2005040011(B1) 申请公布日期 2005.06.30
申请号 WO2004US35217 申请日期 2004.10.25
申请人 ENTEGRIS, INC.;BURNS, JOHN;FULLER, MATTHEW, A.;KING, JEFFREY, J.;FORBES, MARTIN, L.;SMITH, MARK, V. 发明人 BURNS, JOHN;FULLER, MATTHEW, A.;KING, JEFFREY, J.;FORBES, MARTIN, L.;SMITH, MARK, V.
分类号 B65D79/02;H01L21/673;(IPC1-7):B65D85/00;B65D85/30;B65D85/57 主分类号 B65D79/02
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