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发明名称
APPARATUS FOR ETCHING AND METHOD FOR ETCHING WITH USING THE SAME
摘要
申请公布号
KR20050066318(A)
申请公布日期
2005.06.30
申请号
KR20030097588
申请日期
2003.12.26
申请人
LG.PHILIPS LCD CO., LTD.
发明人
HUH, JUNG CHUL;SONG, HYUNG HO;KIM, DO RYUN
分类号
G02F1/13;(IPC1-7):G02F1/13
主分类号
G02F1/13
代理机构
代理人
主权项
地址
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