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发明名称
BATCH TYPE WET STATION EQUIPMENT
摘要
申请公布号
KR20050065736(A)
申请公布日期
2005.06.30
申请号
KR20030095846
申请日期
2003.12.23
申请人
DONGBU ELECTRONICS CO., LTD.
发明人
KIM, YONG JAE;ROH, MIN SOO
分类号
H01L21/302;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
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地址
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