| 摘要 |
PROBLEM TO BE SOLVED: To provide a semi-conductor inspection device to accurately measure performance of a semi-conductor. SOLUTION: A semi-conductor inspection device 100 comprises a probe 112 having a plunger 122 in which one of the edges thereof has electrical interconnection with a semi-conductor device and the other edge has a slope and an elastic body 123 which contracts due to depression of the plunger 122 when the semi-conductor device is approaching, and a printed wiring board 113 on which wiring for testing the semi-conductor device electrically connected to the probe is provided. The printed wiring board 113 comprises a probe holding hole 120 to store the prove and a conductive part 121 which is mounted on the inner wall of the probe holding hole and electrically connected to the wiring. When the plunger moves downward, the probe bends at the contact point of the plunger 112 and the elastic body 123 and the other edge thereof comes into contact with the conductive part 121. COPYRIGHT: (C)2005,JPO&NCIPI |
