| 摘要 |
PROBLEM TO BE SOLVED: To remove at least either of a metallic film or metallic pollution on a peripheral section and a rear face of a substrate without eroding a wiring protective film formed on the substrate by a washing liquid or the like. SOLUTION: The approximately central section of a substrate surface is supplied with a non-oxidizing fluid, horizontally holding the substrate and rotating the substrate in the horizontal direction. At least either of the peripheral section and rear face of the substrate is supplied with the washing liquid. COPYRIGHT: (C)2005,JPO&NCIPI
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