SCANNING ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a scanning method for a scanning electron microscope improving degradation of length measuring precision by shrink of a sample. SOLUTION: By changing a scanning sequence of scanning lines for shortening the time between first and second scans on the same place on a sample, it scans consecutively when the shrink amount is small. COPYRIGHT: (C)2005,JPO&NCIPI