SURFACE INSPECTION METHOD AND SURFACE INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To simplify an inspection method for the surface of a component having a cylindrical body shape. SOLUTION: This method for inspecting optically a cylindrical outer surface is characterized by having a sensor capable of receiving linear parallel light for irradiating the whole width of an inspection region at a prescribed angle from the axial direction of a cylinder and regularly reflected light from the whole area of the inspection region. COPYRIGHT: (C)2005,JPO&NCIPI